1. Microfabrication of fine lines in LTCC technology using photolithography
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Study and development of new fabrication processes using both thick- and thin-film deposition techniques with photolithography in order to achieve 10 microns line/space resolution. |
2. Substrate integrated cavity resonators in LTCC technology
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Design and fabrication of miniaturized high-Q filters based on coaxial resonators embedded into the dielectric material. |